STPA1603C

Inlet flange

ISO200F

Outlet port

KF40

Purge port

KF10

Water cooling fitting

PT1/4

Pumping Speed

  N₂

1600 ls^-1

  H₂

1200 ls^-1

Compression ratio

  N₂

>10⁸

  H₂

>7 x 10³

Ultimate pressure with bake out heating

10^-7 Pa (10^-9 Torr order)

Max allowable backing pressure

266 Pa

(2 Torr)

Max Nitrogen throughput

2500 sccm

Rated speed

36500 rpm

Starting time

7 min

Mounting position

Any

Water cooling flow

2 lmin^-1

Temperature

5-25 °C

Pressure

0.3 MPa

Recommended purge gas flow

20 - 50 sccm

Input voltage

200 to 240 (± 10) V a.c.

Power consumption

0.85 kVA

Pump weight

35 kg

Controller weight

9 kg