STP603

Inlet flange

ISO160F

Outlet port

KF40

Pumping Speed

N₂

650 ls^-1

H₂

550 ls^-1

Compression ratio

N₂

>10⁸

H₂

>10⁵

Ultimate pressure with bake out heating (VG/ISO flange)

10^-7 Pa (10^-9Torr)

Ultimate Pressure with bake out heating (ICF flange)

10^-8 Pa (10^-10 Torr)

Max continuous outlet pressure

13 Pa (0.1 Torr)

Rated speed

35000 rpm

Starting time

6 min

Max inlet flange temp

120 °C

Input voltage

100 to 120 (± 10) V a.c. or

200 to 240 (± 10) V a.c.

Power consumption at start up

0.8 kVA

Pump weight

31 kg

Controller weight

9 kg