STPA2203C

Inlet flange

ISO250F

Outlet port

KF40

Purge port

KF10

Water cooling fitting

PT1/4

Pumping Speed

  N₂

2200 ls^-1

  H₂

1700 ls^-1

Compression ratio

  N₂

>10⁸

  H₂

>2.5 x 10⁴

Ultimate pressure

10^-6 Pa

(10^-8 Torr)

Maximum allowable backing pressure

400 Pa

(3 Torr)

Maximum Nitrogen throughput

1500 sccm

Rated speed

27000 rpm

Starting time

7 min

Mounting position

Any

Water cooling flow

2 lmin^-1

Water cooling temperature

5-25 °C

Pressure

0.3 MPa

Recommended purge gas flow

20 sccm

Input voltage

200 to 240 (± 10) V a.c.

Power consumption

1.5 kVA

Pump weight

61 kg

Controller weight

11 kg