STP-XA4503C

Inlet flange size

VF300, ISO320F, VG350

Backing port size

KF40

Pumping speed

  N₂

3800 to 4300 ls^-1

(dependant on model)

  H₂

2500 ls^-1

Compression ratio

  N₂

>10⁸

  H₂

6 x 10³

Ultimate pressure

10^-7 Pa / 10^-9 Torr

Max allowable backing pressure

266 Pa / 2 Torr

Max allowable gas flow N₂
(Water cooled only)

2800 sccm

4.73 Pam³s^-1

Maximum allowable gas flow Ar
(Water cooled only)

2150 sccm

3.63 Pam³s^-1

Rated speed

24000 rpm

Run up time to 90% rated speed

12 minutes

Mounting position

Any orientation

Water cooling

  Flow

3 lmin^-1

  Temperature

5 – 25 °C / 41 – 77 °F

  Pressure

0.3 MPa

Recommended purge gas flow N₂

50 sccm / 8.4 x 10^-2 Pam³s^-1

Input voltage

200 – 240 ±10 % V a.c.

Maximum input power (without TMS)

1.5 KVA