STP-L301

Inlet flange

VG100/ISO100/ICF152

Outlet port

KF25

Purge port

KF10

Pumping Speed

  N₂

260 ls^-1

  H₂

290 ls^-1

Compression ratio

  N₂

>10⁸

  He

5 x 10⁵

  H₂

2 x 10⁴

Ultimate pressure with bake out heating (VG/ISO flange)

6.5 x 10^-6 Pa

(5 x 10^-8 Torr)

Ultimate Pressure with bake out heating (ICF flange)

10^-8 Pa

(10^-10 Torr)

Max allowable inlet pressure ambient cooled

6.7 x 10^-2 Pa

(5 x 10^-4 Torr)

Max continuous outlet pressure ambient cooled

13 Pa

(0.1 Torr)

Rated speed

48000 rpm

Starting time

3 min

Maximum inlet flange temperature

120 °C

Input voltage

100 to 120 (± 10) V a.c. or

200 to 240 (± 10) V a.c.

Power consumption at start up

0.55 kVA

Pump weight

13 kg

Controller weight

8 kg